Novellus Systems, Inc. (NVLS) Announces Availability of Ashable Hard Mask Process Technology to the VECTOR Extreme Platform
Novellus Systems, Inc. (NVLS), based in San Jose, California, is a provider of advanced process equipment for the global semiconductor industry. The company is a supplier of chemical vapor deposition (CVD), physical vapor deposition (PVD), electrochemical deposition (ECD), chemical mechanical planarization (CMP), ultraviolet thermal processing (UVTP), and surface preparation equipment used in the manufacturing of semiconductors. Products such as the CVD, PVD and ECD are used to deposit extremely thin films of insulating and conductive materials that are used to create the wiring on a chip. Novellus has announced the availability of an ashable hard mask (AHM) process configuration for…